Cash: A New Spc Scheme Based on Cluster Analysis in Excess Variety

10 Pages Posted: 12 Sep 2004

See all articles by Bin Nie

Bin Nie

University of Tianjin - Department of Industrial Engineering

Er Shi Qi

University of Tianjin - Department of Industrial Engineering

Abstract

Precise control of process has become increasingly important in today's high-tech industries owing to the shrinking feature sizes and complex process technologies. In particular, there are excess varieties involved in the process. In this paper, we proposed a methodology called CASH that is a new SPC scheme based on cluster analysis and Shewhart control charts to deal with excess variety process control. This CASH scheme is implemented in a LED factory and the result is satisfactory.

Keywords: Statistical process control (SPC), Cluster analysis, Shewhart control chart, Analysis of variance (ANOVA), Semiconductor manufacturing

JEL Classification: G14, G15

Suggested Citation

Nie, Bin and Qi, Er Shi, Cash: A New Spc Scheme Based on Cluster Analysis in Excess Variety. Available at SSRN: https://ssrn.com/abstract=588025

Bin Nie (Contact Author)

University of Tianjin - Department of Industrial Engineering ( email )

P.O. box 9007
Tianjin 300072
China

Er Shi Qi

University of Tianjin - Department of Industrial Engineering ( email )

P.O. box 9007
Tianjin 300072
China

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